Shen, B., Allard, M., Boughaba, S., Izquierdo, R. and Meunier, M..
1996.
« Laser-micromachining silicon three-dimensional structures, tunnels, and cavities ».
Canadian Journal of Physics = Revue canadienne de physique, vol. 74.
S54-S58.
Compte des citations dans Scopus : 1.
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Official URL: https://doi.org/10.1139/p96-832
| Item Type: | Peer reviewed article published in a journal |
|---|---|
| Professor: | Professor Izquierdo, Ricardo |
| Affiliation: | Autres |
| Date Deposited: | 19 Sep 2022 19:16 |
| Last Modified: | 21 Jan 2026 15:17 |
| URI: | https://espace2.etsmtl.ca/id/eprint/25392 |
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