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Laser-micromachining silicon three-dimensional structures, tunnels, and cavities

Shen, B., Allard, M., Boughaba, S., Izquierdo, R. et Meunier, M.. 1996. « Laser-micromachining silicon three-dimensional structures, tunnels, and cavities ». Canadian Journal of Physics, vol. 74. S54-S58.

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Item Type: Peer reviewed article published in a journal
Professor:
Professor
Izquierdo, Ricardo
Affiliation: Autres
Date Deposited: 19 Sep 2022 19:16
Last Modified: 19 Sep 2022 19:16
URI: https://espace2.etsmtl.ca/id/eprint/25392

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