ENGLISH
La vitrine de diffusion des publications et contributions des chercheurs de l'ÉTS
RECHERCHER

A study of optimizing lamb wave acoustic mass sensors' performance through adjustment of the transduction electrode metallization ratio

Gholami, Fatemeh, Shih, Andy, Robichaud, Alexandre et Cicek, Paul-Vahe. 2022. « A study of optimizing lamb wave acoustic mass sensors' performance through adjustment of the transduction electrode metallization ratio ». Sensors, vol. 22, nº 17.

[thumbnail of Shih-A-2022-25579.pdf]
Prévisualisation
PDF
Shih-A-2022-25579.pdf - Version publiée
Licence d'utilisation : Creative Commons CC BY.

Télécharger (4MB) | Prévisualisation

Résumé

This paper presents the design and simulation of a mass sensitive Lamb wave microsensor with CMOS technology provided by SilTerra. In this work, the effects of the metalization ratio variation on the transmission gain, total harmonic distortion (THD), and two different resonant modes (around 66 MHz and 86 MHz) are shown. It has been found that the metalization ratio can be adjusted in order to obtain a compromise between transmission gain and sensitivity, depending on the design criteria. By adding a Si3N4 layer on top of the device, a five-fold improvement in transmission gain is reached. It was also shown that the transmission of the input differential IDT configuration is 20% more efficient than a single terminal. With this combination, the mass sensitivity is about 114 [cm2/gr].

Type de document: Article publié dans une revue, révisé par les pairs
Professeur:
Professeur
Shih, Andy
Affiliation: Génie électrique
Date de dépôt: 06 oct. 2022 15:47
Dernière modification: 12 oct. 2022 17:57
URI: https://espace2.etsmtl.ca/id/eprint/25579

Actions (Authentification requise)

Dernière vérification avant le dépôt Dernière vérification avant le dépôt