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A study of optimizing lamb wave acoustic mass sensors' performance through adjustment of the transduction electrode metallization ratio

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Gholami, Fatemeh, Shih, Andy, Robichaud, Alexandre and Cicek, Paul-Vahe. 2022. « A study of optimizing lamb wave acoustic mass sensors' performance through adjustment of the transduction electrode metallization ratio ». Sensors, vol. 22, nº 17.

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Abstract

This paper presents the design and simulation of a mass sensitive Lamb wave microsensor with CMOS technology provided by SilTerra. In this work, the effects of the metalization ratio variation on the transmission gain, total harmonic distortion (THD), and two different resonant modes (around 66 MHz and 86 MHz) are shown. It has been found that the metalization ratio can be adjusted in order to obtain a compromise between transmission gain and sensitivity, depending on the design criteria. By adding a Si3N4 layer on top of the device, a five-fold improvement in transmission gain is reached. It was also shown that the transmission of the input differential IDT configuration is 20% more efficient than a single terminal. With this combination, the mass sensitivity is about 114 [cm2/gr].

Item Type: Peer reviewed article published in a journal
Professor:
Professor
Shih, Andy
Affiliation: Génie électrique
Date Deposited: 06 Oct 2022 15:47
Last Modified: 12 Oct 2022 17:57
URI: https://espace2.etsmtl.ca/id/eprint/25579

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