Vertical electrostatic MEMS aligner with integrated silicon nitride optical waveguides

Nabavi, Seyedfakhreddin, Menard, Michaël and Nabki, Frederic. 2022. « Vertical electrostatic MEMS aligner with integrated silicon nitride optical waveguides ». In IEEE Sensors (Dallas, TX, USA, Oct. 30-Nov. 02, 2022) Institute of Electrical and Electronics Engineers Inc..
Compte des citations dans Scopus : 3.

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Item Type:	Conference proceeding
Professor:	Professor Ménard, Michaël Nabki, Frédéric
Affiliation:	Génie électrique, Génie électrique
Date Deposited:	07 Jan 2023 01:04
Last Modified:	07 Jan 2023 01:04
URI:	https://espace2.etsmtl.ca/id/eprint/26089

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