Lamé resonator integrated with chevron-shaped thermal actuators to improve motional resistance and temperature stability

Kolahdouz-Moghaddam, Amir-Reza, Nabavi, Seyedfakhreddin and Nabki, Frederic. 2023. « Lamé resonator integrated with chevron-shaped thermal actuators to improve motional resistance and temperature stability ». Journal of Microelectromechanical Systems, vol. 32, nº 3. pp. 229-240.
Compte des citations dans Scopus : 3.

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Item Type:	Peer reviewed article published in a journal
Professor:	Professor Nabki, Frédéric
Affiliation:	Génie électrique
Date Deposited:	30 May 2023 20:51
Last Modified:	11 Jul 2023 18:01
URI:	https://espace2.etsmtl.ca/id/eprint/26492

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