A suspended MEMS inductor of a new geometry and a novel anchor for RF applications

Elzayat, Ahmed, Degbe, Médéa, Domingue, Frédéric and Nerguizian, Vahé. 2006. « A suspended MEMS inductor of a new geometry and a novel anchor for RF applications ». In IEEE International Symposium on Industrial Electronics (ISIE) (Montreal, Canada, Jul. 9-13, 2006) pp. 3332-3337. Piscataway, NJ, USA : Institute of Electrical and Electronics Engineers.
Compte des citations dans Scopus : 4.

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Item Type:	Conference proceeding
ISBN:	1-4244-0496-7
Professor:	Professor Nerguizian, Vahé
Affiliation:	Génie électrique
Date Deposited:	30 Oct 2012 18:18
Last Modified:	30 Oct 2012 18:18
URI:	https://espace2.etsmtl.ca/id/eprint/2710

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