Plasma-etched GaAs optomechanical microdisks fabricated with an electro-lithographic soft mask

Benevides, Rodrigo, Ménard, Michaël, Wiederhecker, Gustavo S. and Alegre, Thiago P. Mayer. 2018. « Plasma-etched GaAs optomechanical microdisks fabricated with an electro-lithographic soft mask ». In Latin America Optics and Photonics Conference 2018 (Lima, Peru, Nov. 12-15, 2018) OSA - The Optical Society.

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Item Type:	Conference proceeding
Additional Information:	Identifiant de l'article: W4D.2
Professor:	Professor Ménard, Michaël
Affiliation:	Autres
Date Deposited:	16 Aug 2023 19:05
Last Modified:	16 Aug 2023 19:05
URI:	https://espace2.etsmtl.ca/id/eprint/27385

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