Toward 2.5D structures for multi-channel MEMS acoustic-based digital isolators using through silicon openings

Sadrimanesh, Hamid, Blaquière, Yves and Nabki, Frederic. 2023. « Toward 2.5D structures for multi-channel MEMS acoustic-based digital isolators using through silicon openings ». In 21st IEEE Interregional NEWCAS Conference (NEWCAS) (Edinburgh, UK, June 26-28, 2023) Institute of Electrical and Electronics Engineers Inc..
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Item Type:	Conference proceeding
Professor:	Professor Blaquière, Yves Nabki, Frédéric
Affiliation:	Génie électrique, Génie électrique
Date Deposited:	13 Sep 2023 19:09
Last Modified:	13 Sep 2023 19:09
URI:	https://espace2.etsmtl.ca/id/eprint/27668

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