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Toward a polysilicon-based electrostatically actuated DC MEMS switch

Shuaibu, Abdurrashid Hassan, Blaquière, Yves and Nabki, Frédéric. 2023. « Toward a polysilicon-based electrostatically actuated DC MEMS switch ». In 21st IEEE Interregional NEWCAS Conference (NEWCAS) (Edinburgh, UK, June 26-28, 2023) Institute of Electrical and Electronics Engineers Inc..

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Item Type: Conference proceeding
Professor:
Professor
Blaquière, Yves
Nabki, Frédéric
Affiliation: Génie électrique, Génie électrique
Date Deposited: 13 Sep 2023 19:09
Last Modified: 13 Sep 2023 19:09
URI: https://espace2.etsmtl.ca/id/eprint/27669

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