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A monolithic LTCC-MEMS microfabrication process

Fallahnia, Ehsan and Kouki, Ammar B.. 2023. « A monolithic LTCC-MEMS microfabrication process ». Journal of Microelectromechanical Systems, vol. 32, nº 6. pp. 612-621.

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Item Type: Peer reviewed article published in a journal
Professor:
Professor
Kouki, Ammar B.
Affiliation: Génie électrique
Date Deposited: 03 Oct 2023 14:45
Last Modified: 19 Jan 2024 14:06
URI: https://espace2.etsmtl.ca/id/eprint/27882

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