Fallahnia, Ehsan and Kouki, Ammar B..
2023.
« A monolithic LTCC-MEMS microfabrication process ».
Journal of Microelectromechanical Systems, vol. 32, nº 6.
pp. 612-621.
Compte des citations dans Scopus : 3.
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Official URL: https://doi.org/10.1109/JMEMS.2023.3310932
| Item Type: | Peer reviewed article published in a journal |
|---|---|
| Professor: | Professor Kouki, Ammar B. |
| Affiliation: | Génie électrique |
| Date Deposited: | 03 Oct 2023 14:45 |
| Last Modified: | 19 Jan 2024 14:06 |
| URI: | https://espace2.etsmtl.ca/id/eprint/27882 |
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