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Sensitivity analysis of novel PolyMUMPs-based ultrasonic MEMS microphones

Pournaki, Ilgar Jafarsadeghi, Heidari, Navid, Gratuze, Mathieu, Elsayed, Mohannad Y., Tawfik, Hani H. and Nabki, Frederic. 2023. « Sensitivity analysis of novel PolyMUMPs-based ultrasonic MEMS microphones ». In IEEE International Ultrasonics Symposium (IUS) (Montreal, QC, Canada, Sept. 03-08, 2023) IEEE Computer Society.

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Item Type: Conference proceeding
Professor:
Professor
Nabki, Frédéric
Affiliation: Génie électrique
Date Deposited: 18 Dec 2023 19:40
Last Modified: 18 Dec 2023 19:40
URI: https://espace2.etsmtl.ca/id/eprint/28207

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