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An electrostatic micropositioner with 3 degrees-of-freedom

Nabavi, Seyedfakhreddin, Ménard, Michaël and Nabki, Frederic. 2023. « An electrostatic micropositioner with 3 degrees-of-freedom ». In IEEE Sensors (Vienna, Austria, Oct. 28-Nov. 01, 2023) Institute of Electrical and Electronics Engineers Inc..

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Item Type: Conference proceeding
Professor:
Professor
Ménard, Michaël
Nabki, Frédéric
Affiliation: Génie électrique, Génie électrique
Date Deposited: 04 Jan 2024 20:39
Last Modified: 04 Jan 2024 20:39
URI: https://espace2.etsmtl.ca/id/eprint/28231

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