Rabih, Almur A. S., Nabavi, Seyedfakhreddin, Ménard, Michaël and Nabki, Frederic.
2024.
« A 3 degrees-of-freedom electrothermal micro-positioner for optical chip-to-chip alignment ».
Journal of Microelectromechanical Systems, vol. 33, nº 2.
pp. 260-273.
Rechercher dans Google Scholar
Official URL: https://doi.org/10.1109/JMEMS.2024.3371829
| Item Type: | Peer reviewed article published in a journal |
|---|---|
| Professor: | Professor Ménard, Michaël Nabki, Frédéric |
| Affiliation: | Génie électrique, Génie électrique |
| Date Deposited: | 02 Apr 2024 15:51 |
| Last Modified: | 10 May 2024 16:13 |
| URI: | https://espace2.etsmtl.ca/id/eprint/28504 |
Actions (login required)
 |
View Item |