A 3 degrees-of-freedom electrothermal micro-positioner for optical chip-to-chip alignment

Rabih, Almur A. S., Nabavi, Seyedfakhreddin, Ménard, Michaël and Nabki, Frederic. 2024. « A 3 degrees-of-freedom electrothermal micro-positioner for optical chip-to-chip alignment ». Journal of Microelectromechanical Systems, vol. 33, nº 2. pp. 260-273.
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Official URL: https://doi.org/10.1109/JMEMS.2024.3371829

Item Type:	Peer reviewed article published in a journal
Professor:	Professor Ménard, Michaël Nabki, Frédéric
Affiliation:	Génie électrique, Génie électrique
Date Deposited:	02 Apr 2024 15:51
Last Modified:	10 May 2024 16:13
URI:	https://espace2.etsmtl.ca/id/eprint/28504

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