Bensalem, Roufaida, Elsayed, Mohannad Y., Tawfik, Hani H., Nabki, Frederic et El-Gamal, Mourad N..
2023.
« Enhancing linearity in parallel-plate MEMS varactors through repulsive actuation ».
Micro, vol. 3, nº 4.
pp. 811-821.
Compte des citations dans Scopus : 2.
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Résumé
This paper presents a new MEMS varactor that uses repulsive actuation to achieve an ultra-linear capacitance-to-voltage response. The approach proposed involves actuating the moveable electrode away from the fixed electrode, instead of the conventional closing-the-gap direction. This increasing-gap movement reduces the capacitance as the actuation voltage increases. The MEMS variable capacitor is fabricated using PolyMUMPs technology and exhibits an excellent linearity factor of 99.7% in capacitance-to-voltage response, and a capacitance tuning ratio of 11� was achieved. The proposed strategy will enable the development of high-performance MEMS-based tunable devices for various applications.
| Type de document: | Article publié dans une revue, révisé par les pairs |
|---|---|
| Professeur: | Professeur Nabki, Frédéric |
| Affiliation: | Génie électrique |
| Date de dépôt: | 04 sept. 2024 19:47 |
| Dernière modification: | 12 sept. 2024 18:44 |
| URI: | https://espace2.etsmtl.ca/id/eprint/29383 |
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