Bensalem, Roufaida, Elsayed, Mohannad Y., Tawfik, Hani H., Nabki, Frederic and El-Gamal, Mourad N..
2023.
« Enhancing linearity in parallel-plate MEMS varactors through repulsive actuation ».
Micro, vol. 3, nº 4.
pp. 811-821.
Preview |
PDF
Nabki-F-2023-29383.pdf - Published Version Use licence: Creative Commons CC BY. Download (3MB) | Preview |
Abstract
This paper presents a new MEMS varactor that uses repulsive actuation to achieve an ultra-linear capacitance-to-voltage response. The approach proposed involves actuating the moveable electrode away from the fixed electrode, instead of the conventional closing-the-gap direction. This increasing-gap movement reduces the capacitance as the actuation voltage increases. The MEMS variable capacitor is fabricated using PolyMUMPs technology and exhibits an excellent linearity factor of 99.7% in capacitance-to-voltage response, and a capacitance tuning ratio of 11� was achieved. The proposed strategy will enable the development of high-performance MEMS-based tunable devices for various applications.
| Item Type: | Peer reviewed article published in a journal |
|---|---|
| Professor: | Professor Nabki, Frédéric |
| Affiliation: | Génie électrique |
| Date Deposited: | 04 Sep 2024 19:47 |
| Last Modified: | 12 Sep 2024 18:44 |
| URI: | https://espace2.etsmtl.ca/id/eprint/29383 |
Actions (login required)
 |
View Item |