A literature survey on the design approaches and operational issues of automated wafer-transport systems for wafer fabs

Montoya-Torres, J. R.. 2006. « A literature survey on the design approaches and operational issues of automated wafer-transport systems for wafer fabs ». Production Planning and Control, vol. 17, nº 7. pp. 648-663.
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Item Type:	Peer reviewed article published in a journal
Professor:	Professor Montoya Torres, Jairo
Affiliation:	Autres
Date Deposited:	22 Nov 2024 21:51
Last Modified:	22 Nov 2024 21:51
URI:	https://espace2.etsmtl.ca/id/eprint/29961

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