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Q-enhancement of piezo-on-silicon mems resonators through mode-coupling and topological tank configurations

Balghari, Suaid Tariq, Ali, Abid and Nabki, Frederic. 2024. « Q-enhancement of piezo-on-silicon mems resonators through mode-coupling and topological tank configurations ». In Solid-State Sensors, Actuators and Microsystems Workshop (Hilton Head Island, SC, USA, June 02-06, 2024) pp. 39-42. Transducer Research Foundation.

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Item Type: Conference proceeding
Professor:
Professor
Nabki, Frédéric
Affiliation: Génie électrique
Date Deposited: 04 Sep 2025 13:01
Last Modified: 04 Sep 2025 13:01
URI: https://espace2.etsmtl.ca/id/eprint/31609

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