Mechanical mode coupled piezo-on-silicon bulk acoustic wave MEMS resonators in tank configuration for Q-enhancement

Balghari, Suaid Tariq, Ali, Abid, Gratuze, Mathieu and Nabki, Frederic. 2025. « Mechanical mode coupled piezo-on-silicon bulk acoustic wave MEMS resonators in tank configuration for Q-enhancement ». Journal of Microelectromechanical Systems.
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Item Type:	Peer reviewed article published in a journal
Professor:	Professor Nabki, Frédéric
Affiliation:	Génie électrique
Date Deposited:	15 Jan 2026 21:48
Last Modified:	15 Jan 2026 21:48
URI:	https://espace2.etsmtl.ca/id/eprint/33233

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