Shuaibu, Abdurrashid Hassan, Rabih, Almur A. S., Blaquiére, Yves et Nabki, Frederic.
2026.
« A resettable polysilicon MEMS-based circuit breaker ».
Journal of Micromechanics and Microengineering, vol. 36, nº 6.
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Journal of Micromechanics and Microengineering Purpose-Led Publishing, find out more. Paper • The following article isOpen access A resettable polysilicon MEMS-based circuit breaker Abdurrashid Hassan Shuaibu*, Almur A S Rabih, Yves Blaquiére and Frederic Nabki Published 19 June 2026 • © 2026 The Author(s). Published by IOP Publishing Ltd Journal of Micromechanics and Microengineering, Volume 36, Number 6 Citation Abdurrashid Hassan Shuaibu et al 2026 J. Micromech. Microeng. 36 065002 DOI 10.1088/1361-6439/ae744e PDFOpens in a new tab. Authors Figures Tables References Open science Article metrics 340 Total downloads Submit Submit to this Journal Share this article Article information Abstract This work presents a novel resettable microelectromechanical systems-based circuit breaker (MCB) that utilizes electrostatic actuation for switching and Joule heating for reset functionality. The device integrates a dual air gap and a straight beam suspension structure to enhance contact force, reduce resistance, and improve switching efficiency. Fabricated using the PolyMUMPs process, the MCB features a polysilicon microbridge that achieves stable contact at an electrostatic actuation voltage of approximately 75 V. The circuit-interruption threshold was experimentally determined to be 14–17 mA. Experimental results further validate that the device achieves an average single contact resistance of 162.5 Ω , and a total MCB resistance of 325 Ω , demonstrating its suitability for current-limiting and protection applications.
| Type de document: | Article publié dans une revue, révisé par les pairs |
|---|---|
| Chercheur(-euse): | Chercheur(-euse) Blaquière, Yves Nabki, Frédéric |
| Affiliation: | Génie électrique, Génie électrique |
| Date de dépôt: | 14 juill. 2026 15:42 |
| Dernière modification: | 26 sept. 2026 14:58 |
| URI: | https://espace2.etsmtl.ca/id/eprint/34018 |
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