Heidari, Navid, Pita Ruiz, Julian L., Gratuze, Mathieu, Nabavi, Seyedfakhreddin, Ménard, Michaël et Nabki, Frederic.
2026.
« Pivot-stable electrostatic rotary MEMS structure for alignment-critical applications ».
Sensors and Actuators A: Physical, vol. 409.
Prévisualisation |
PDF
Ménard-M-2026-33877.pdf - Version publiée Licence d'utilisation : Creative Commons CC BY. Télécharger (3MB) | Prévisualisation |
Résumé
This work presents a novel electrostatically actuated rotary MEMS structure optimized for high-precision in-plane rotation with low parasitic displacement. The design integrates curved comb-drive electrodes with symmetrical U-shaped suspension springs to enable controlled bidirectional rotation while minimizing undesirable lateral and out-of-plane motion. Analytical modeling, finite element simulations, and experimental measurements consistently demonstrate a maximum angular displacement of ± 2.2 ∘ at 150 V, with unwanted lateral translational motion confined below 190 nm along both the X and Y directions, and out-of-plane motion confined under 300 nm in the Z direction. The platform stable center of rotation and suppressed parasitic displacement make it highly suitable for applications such as MOEMS-based optical switches, where alignment precision is critical. In addition, the platform features a lateral gap-closing mechanism actuated electrostatically, enabling tunable displacement for alignment-critical optical applications while preventing pull-in through stopper integration. Furthermore, this work provides an analytical formulation of torque and stiffness. The proposed device occupies an area of 1 mm × 2 mm and is fabricated using the PiezoMUMPs process with a 10 µm thick device layer.
| Type de document: | Article publié dans une revue, révisé par les pairs |
|---|---|
| Chercheur(-euse): | Chercheur(-euse) Ménard, Michaël Nabki, Frédéric |
| Affiliation: | Génie électrique, Génie électrique |
| Date de dépôt: | 02 juill. 2026 20:52 |
| Dernière modification: | 26 sept. 2026 14:21 |
| URI: | https://espace2.etsmtl.ca/id/eprint/33877 |
Actions (Authentification requise)
 |
Dernière vérification avant le dépôt |